NEVER, EVER wash an engine on a late model vehicle. You can do thousands of dollars in damage to multiple electronic control units.
Use a blow dryer on everything you can but the damage may already be done.

Agree with Wrenchtech. Rather use a paint brush to clean and vacuum any loose dirt. Try replacing coil. Does not like water and due to age develops tiny cracks which if engine was hot when washed, these cracks would absorb moisture which will make starting difficult or create some serious misfire

I think he probably has it resolved now since he asked the question 5 months ago.